Tailored nanoparticle films from monosized tin oxide nanocrystals: Particle synthesis, film formation, and size-dependent gas-sensing properties

被引:108
作者
Kennedy, MK
Kruis, FE
Fissan, H
Mehta, BR
Stappert, S
Dumpich, G
机构
[1] Univ Duisburg, Fac Engn Sci, D-47057 Duisburg, Germany
[2] Indian Inst Technol, Dept Phys, Thin Film Lab, New Delhi 110016, India
[3] Fac Nat Sci, D-47048 Duisburg, Germany
关键词
D O I
10.1063/1.1525855
中图分类号
O59 [应用物理学];
学科分类号
摘要
In order to investigate the change of gas-sensitive properties of undoped tin oxide nanoparticle films depending on particle size, a thin film synthesis technique has been developed. Well-defined tin oxide nanoparticles have been prepared using a gas-phase condensation method. Pure SnO was used as starting material and was evaporated at T=820degreesC. The resulting particles were sintered and crystallized in-flight at T=650degreesC. Size-selected nanoparticles ranging from 10 to 35 nm were produced to form a nanoparticle film by means of electrostatic precipitation or low pressure impaction. The effect of in-flight oxidation, sintering, and crystallization on the structure, size, and size distribution of nanoparticles have been studied in detail. The samples show n-type semiconductors' behavior like bulk SnO2. The influence of particle size on gas sensitivity and response behavior is investigated for C2H5OH at operating temperatures 200-300degreesC using silicon substrates having an interdigitated contact pattern and an integrated heating system. In the range of 10-35 nm it has been shown unambiguously that decreasing the particle size of tin oxide particles leads to an increase of the sensitivity and a more rapid response on changing gas conditions. The effect is especially clear for films with a particle size of 20 nm or smaller. (C) 2003 American Institute of Physics.
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页码:551 / 560
页数:10
相关论文
共 41 条
  • [1] PREPARATION OF GAS SENSITIVE FILM BY DEPOSITION OF ULTRAFINE TIN DIOXIDE PARTICLES
    ADACHI, M
    OKUYAMA, K
    KOUSAKA, Y
    TANAKA, H
    [J]. JOURNAL OF AEROSOL SCIENCE, 1988, 19 (02) : 253 - 263
  • [2] Hydrothermal treatment of tin oxide sol solution for preparation of thin-film sensor with enhanced thermal stability and gas sensitivity
    Baik, NS
    Sakai, G
    Shimanoe, K
    Miura, N
    Yamazoe, N
    [J]. SENSORS AND ACTUATORS B-CHEMICAL, 2000, 65 (1-3) : 97 - 100
  • [3] STRUCTURE OF TIN OXIDE LAYERS AND OPERATING TEMPERATURE AS FACTORS DETERMINING THE SENSITIVITY PERFORMANCES TO NO(X)
    BARBI, GB
    BLANCO, JS
    [J]. SENSORS AND ACTUATORS B-CHEMICAL, 1993, 16 (1-3) : 372 - 378
  • [4] OXYGEN-CHEMISORPTION ON TIN OXIDE - CORRELATION BETWEEN ELECTRICAL-CONDUCTIVITY AND ELECTRON-PARAMAGNETIC-RES MEASUREMENTS
    CHANG, SC
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1980, 17 (01): : 366 - 369
  • [5] Design and evaluation of a nanometer aerosol differential mobility analyzer (Nano-DMA)
    Chen, DR
    Pui, DYH
    Hummes, D
    Fissan, H
    Quant, FR
    Sem, GJ
    [J]. JOURNAL OF AEROSOL SCIENCE, 1998, 29 (5-6) : 497 - 509
  • [6] THE PHYSICS AND CHEMISTRY OF THE SINTERING OF SILICON
    COBLENZ, WS
    [J]. JOURNAL OF MATERIALS SCIENCE, 1990, 25 (06) : 2754 - 2764
  • [7] Influence on the gas sensor performances of the metal chemical states introduced by impregnation of calcinated SnO2 sol-gel nanocrystals
    Diéguez, A
    Vilà, A
    Cabot, A
    Romano-Rodríguez, A
    Morante, JR
    Kappler, J
    Bârsan, N
    Weimar, U
    Göpel, W
    [J]. SENSORS AND ACTUATORS B-CHEMICAL, 2000, 68 (1-3) : 94 - 99
  • [8] Development of an electrostatic precipitator for off-line particle analysis
    Dixkens, J
    Fissan, H
    [J]. AEROSOL SCIENCE AND TECHNOLOGY, 1999, 30 (05) : 438 - 453
  • [9] In situ electrical transport during isothermal annealing of nanocrystalline gold films
    Ederth, J
    Kish, LB
    Olsson, E
    Granqvist, CG
    [J]. JOURNAL OF APPLIED PHYSICS, 2002, 91 (03) : 1529 - 1535
  • [10] FAGLIA G, 1998, SENSOR ACTUAT B-CHEM, V53, P255