An arrangement of micrometer-sized powder particles by electron beam drawing

The creation of new advanced functional materials is anticipated by assembling micrometersized particles which have various functions. In this work, a new concept for assembling powder particles is proposed and preliminary research results of the assembling process are reported. The process for assembling is as follows: (1) electrified patterns are formed on an insulating substrate using an electron beam drawing and are observed with an SEM by the voltage contrast method, (2) the substrates are dipped into a solvent in which particles are dispersed, and (3) the particles are adhered to the electrified patterns under suitable conditions. The number of adhered particles depends on the concentration of particles in a solvent, the electron dose of electrification and the dipping time of the substrate into the solvent. Using adequate values of these parameters, spherical silica particles of 5 mu m diameter were arranged on calcium titanate substrates.