Three-dimensional microfabrication using two-photon activated chemistry

被引：19

作者：

Kuebler, SM ^{[1
]}

Cumpston, BH ^{[1
]}

Ananthavel, S ^{[1
]}

Barlow, S ^{[1
]}

Ehrlich, JE ^{[1
]}

Erskine, LL ^{[1
]}

Heikal, AA ^{[1
]}

McCord-Maughon, D ^{[1
]}

Qin, J ^{[1
]}

Röckel, H ^{[1
]}

Rumi, M ^{[1
]}

Marder, SR ^{[1
]}

Perry, JW ^{[1
]}

机构：

[1] Univ Arizona, Dept Chem, Organ Mat & Technol Lab, Tucson, AZ 85721 USA

来源：

MICRO- AND NANO-PHOTONIC MATERIALS AND DEVICES | 2000年 / 3937卷

关键词：

microfabrication; two-photon absorption; photopolymerization; micro-electromechanical systems (MEMS); photonic bandgap;

D O I：

10.1117/12.382799

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Photochemical reactions which can be activated by the simultaneous absorption of two photons provide a means for single-step fabrication of complex three-dimensional microstructures. These types of structures are needed for a wide range of applications, including microfluidics, electrooptics, and micro-electromechanical systems (MEMS). We have shown that chromophores can be engineered to have both large two-photon absorptivities as well as an efficient means for activating chemical processes, such as radical polymerization, subsequent to the photoexcitation. Chromophores designed following this strategy two-photon-activate the radical polymerization of acrylates at lower incident laser powers than conventional UV initiators. Efficient two-photon photopolymer resins based on these chromophores were used in the fabrication of complex microarchitectures, such as photonic bandgap structures and tapered waveguides. We have devised a strategy which allows this approach to be extended to other chemical systems.

引用

页码：97 / 105

页数：9

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