Ordered two-dimensional nanowire array formation using self-organized nanoholes of anodically oxidized aluminum

Sell-organization of a two-dimensional array of nanoholes which were formed by anodic oxidation of aluminum was investigated quantitatively using fast Fourier transformation (FFT) analysis of scanning electron microscopy (SEM) images. The highly ordered array of nanoholes with diameters of 26 nm was obtained by two-step anodization at anodic voltage around 40 V, and oxalic acid concentration of 0.5 M. A two-dimensional ordered array of Au free standing nanowires was successfully fabricated by the deposition of Au using DC electroplating in nanoholes of aluminum oxide, by removal of the aluminum oxide barrier layer using wet chemical etching. The present method has a high efficiency to fabricate ordered nanowire array of a variety of conductive materials in a large area, and wide applications for fabricating quantum effect devices and materials would be expected.