Height/width aspect ratio controllable two-dimensional sub-micron arrays fabricated with two-photon photopolymerization

被引:10
作者
Jia, BH [1 ]
Gan, XS [1 ]
Gu, M [1 ]
机构
[1] Swinburne Univ Technol, Sch Biophys Sci & Elect Engn, Ctr Micro Photon, Hawthorn, Vic 3122, Australia
来源
OPTIK | 2004年 / 115卷 / 08期
基金
澳大利亚研究理事会;
关键词
femetosecond laser; photopolymerization; obstruction; aspect ratio;
D O I
10.1078/0030-4026-00370
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
We reported in this paper the use of annular beam illumination to control the transverse and vertical sizes of two-dimensional dot array structures fabricated with two-photon photopolymerization Dot arrays with an element diameter of less than 300 nm, a lattice spacing less than 1 mum has been produced. At the same time, the structure height exhibits a 1.94 times increase averagely and the height/width aspect ratio is improved from 1.21, for the circular beam,illumination case, to,236 after using annular beam illumination.
引用
收藏
页码:358 / 362
页数:5
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