Nanosize diamond formation promoted by direct current glow discharge process: Synchrotron radiation and high resolution electron microscopy studies

Diamond nucleation on Si(100) surfaces can be promoted by a dc-glow discharge process, using a CH4/H-2 gas mixture. However, the phase composition and structure of the carbon film deposited during the dc-glow discharge pretreatment are still unclear. In the present work, we report on a combined study of near edge x-ray absorption fine structure (NEXAFS), and high resolution scanning electron microscopy (HR-SEM) of this film as a function of substrate temperature. NEXAFS measurements of the films deposited by the dc-glow discharge process render unambiguous evidence of diamond phase formation in the 880-900 degrees C substrate temperature range. It is determined from HR-SEM measurements that in this temperature range, nanosize diamond particles are formed. At lower and higher substrate temperatures the NEXAFS results indicate the predominant formation of graphitic carbon. The changes in the film composition as a function of substrate temperature during the dc-glow discharge process is expressed in terms of relative graphitic character (RGC) of the precursor film. (C) 1998 American Institute of Physics. [S0003-6951(98)00720-7].