Tribochemical effects on CNx films

被引：29

作者：

Sánchez-López, JC ^{[1
]}

Donnet, C

Belin, M

Le Mogne, T

Fernández-Ramos, C

Sayagués, MJ

Fernández, A

机构：

[1] Ecole Cent Lyon, Lab Tribol & Dynam Syst, UMR 5513, F-69131 Ecully, France

[2] Ctr Invest Cient Isla Cartuja, Inst Ciencia Mat Sevilla, Seville, Spain

[3] Ctr Invest Cient Isla Cartuja, Dpto Quim Inorgan, Seville, Spain

来源：

SURFACE & COATINGS TECHNOLOGY | 2000年 / 133卷

关键词：

amorphous carbon nitride; reactive sputtering; tribology; environment;

D O I：

10.1016/S0257-8972(00)00928-2

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

CNx thin coatings have been deposited by de magnetron sputtering using a graphite target in nitrogen atmosphere under different experimental conditions. X-Ray photoelectron spectroscopy, electron-energy loss spectroscopy, nuclear magnetic resonance and Fourier-transformed infrared spectroscopy were used to elucidate the structural chemistry of each film. The tribological behavior has been investigated using a reciprocating pin-on-flat tribometer in a wide range of environmental conditions: ambient air, dry air and nitrogen. Tribochemical effects in relation to the nature of the surrounding atmosphere during friction tests are presented. Strong relationships between the N/C ratio, the nature of C-N bonds and the friction behavior are highlighted and discussed. An optimum in the friction and wear properties was found for a maximum in the C=N/C=C ratio for the studied set of CNx samples. The XPS/AES analysis of the sliding counterfaces support a destabilization of the CNx network under friction and build-up of a carbon rich tribolayer under steady-state. (C) 2000 Elsevier Science B.V. All rights reserved.

引用

页码：430 / 436

页数：7

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