AutoMM: Automatic generation of dynamic macromodels for MEMS devices

被引：26

作者：

Swart, NR ^{[1
]}

Bart, SF ^{[1
]}

Zaman, MH ^{[1
]}

Mariappan, M ^{[1
]}

Gilbert, JR ^{[1
]}

Murphy, D ^{[1
]}

机构：

[1] Analog Devices Inc, Cambridge, MA 02139 USA

来源：

MICRO ELECTRO MECHANICAL SYSTEMS - IEEE ELEVENTH ANNUAL INTERNATIONAL WORKSHOP PROCEEDINGS | 1998年

关键词：

D O I：

10.1109/MEMSYS.1998.659750

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

We report on the development of a new CAD tool, AutoMM, which supports the automatic generation of dynamic macromodels for a broad class of MEMS devices. The tool is demonstrated by producing a 2 DOF macromodel of the Analog Devices, Inc. ADXL76 airbag accelerometer. Considerably improved functionality is obtained over earlier models of the device, including prediction of cross-axis dynamic response. Excellent agreement is obtained bet seen simulations and measured data.

引用

页码：178 / 183

页数：2