共 14 条
[1]
DEVRIES MF, 1990, ANN CIRP, V39, P665
[2]
Microultrasonic machining by the application of workpiece vibration
[J].
CIRP ANNALS 1999 - MANUFACTURING TECHNOLOGY,
1999,
:131-134
[3]
Ehrfeld W, 1996, P SOC PHOTO-OPT INS, V2879, P332, DOI 10.1117/12.251221
[4]
FUJINO M, 1995, P ISEM, V11, P613
[5]
Kaneko T, 1984, J JAPAN SOC ELECT MA, V18, P1
[6]
KUO CL, 1992, IEEE MICRO ELECTRO MECHANICAL SYSTEMS : AN INVESTIGATION OF MICRO STRUCTURES, SENSORS, ACTUATORS, MACHINES AND ROBOTS, P116
[7]
Langen HH, 1995, ANN CIRP, V44, P173
[8]
LAUWERS B, 1992, P INT S EL, V10, P190
[9]
Three-dimensional micromachining by machine tools
[J].
CIRP ANNALS 1997 - MANUFACTURING TECHNOLOGY, VOLUME 46/2/1997: ANNALS OF THE INTERNATIONAL INSTITUTION FOR PRODUCTION ENGINEERING RESEARCH,
1997,
:621-628
[10]
Masuzawa T., 1985, CIRP Ann., V34, P431