Test wafer control system in 300mm FAB

被引：2

作者：

Hsu, JW ^{[1
]}

Lo, HL ^{[1
]}

Pan, CC ^{[1
]}

Chen, YM ^{[1
]}

Hsieh, TK ^{[1
]}

机构：

[1] Powerchip Semicond Corp, Hsinchu, Taiwan

来源：

2004 SEMICONDUCTOR MANUFACTURING TECHNOLOGY WORKSHOP PROCEEDINGS | 2004年

关键词：

D O I：

10.1109/SMTW.2004.1393710

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Test Wafers are used in wafer fabrication to monitor equipment stability and product quality. Any shortage will cause the loss of equipment capacity and production move. On the contrary prepare more test wafers to avoid shortage will spend More cost, occupy more Storage space, and lower transfer efficiency. Considering the wafer cost and FAB productivity. an efficient control system of test wafer in 300 nun FAB is much more important than formerly.

引用

页码：33 / 36

页数：4