机构:
GEORGIA INST TECHNOL,MICROELECTR RES CTR,ATLANTA,GA 30332GEORGIA INST TECHNOL,MICROELECTR RES CTR,ATLANTA,GA 30332
Lagorce, LK
[1
]
Allen, MG
论文数: 0引用数: 0
h-index: 0
机构:
GEORGIA INST TECHNOL,MICROELECTR RES CTR,ATLANTA,GA 30332GEORGIA INST TECHNOL,MICROELECTR RES CTR,ATLANTA,GA 30332
Allen, MG
[1
]
机构:
[1] GEORGIA INST TECHNOL,MICROELECTR RES CTR,ATLANTA,GA 30332
来源:
NINTH ANNUAL INTERNATIONAL WORKSHOP ON MICRO ELECTRO MECHANICAL SYSTEMS, IEEE PROCEEDINGS: AN INVESTIGATION OF MICRO STRUCTURES, SENSORS, ACTUATORS, MACHINES AND SYSTEMS
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1996年