Calculated gas temperature profiles in argon glow discharges

被引:57
作者
Revel, I [1 ]
Pitchford, LC [1 ]
Boeuf, JP [1 ]
机构
[1] Univ Toulouse 3, Ctr Phys Plasmas & Applicat Toulouse, UMR 5002, F-31062 Toulouse, France
关键词
D O I
10.1063/1.1288171
中图分类号
O59 [应用物理学];
学科分类号
摘要
We use a previously developed model for the electrical properties of glow discharges, coupled to a Monte Carlo simulation of the heavy particles (ions and fast neutrals) in the cathode sheath region, to calculate the gas heating source term in glow discharges in argon with planar electrodes. The gas temperature profile is calculated from the one-dimensional heat transport equation, and we report results for discharge current densities up to 4 mA/cm(2) for a value of pd (product of the gas pressure and gap spacing) of 1.5 Torr cm. The gas temperature peaks at a position slightly inside the cathode sheath, and at the highest current density reported here the gas temperature reaches 354 K. A large fraction of the energy gained by the ions in the sheath is transported directly to the cathode (mostly through fast neutrals), and the fractional ion energy converted to thermal motion of the gas decreases with increasing current density. We report some results to show the dependence of the gas temperature on the thermal accommodation coefficient. For a constant current, the calculated discharge voltage is somewhat higher when gas heating is taken into account. (C) 2000 American Institute of Physics. [S0021-8979(00)03218-7].
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收藏
页码:2234 / 2239
页数:6
相关论文
共 31 条
[1]   THE CONTRIBUTION OF FAST NEUTRALS TO CATHODE EROSION IN GLOW-DISCHARGES [J].
ABRIL, I ;
GRASMARTI, A ;
VALLESABARCA, JA .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1984, 17 (09) :1841-1849
[2]   ENERGY-DISTRIBUTIONS OF PARTICLES STRIKING THE CATHODE IN A GLOW-DISCHARGE [J].
ABRIL, I ;
GRASMARTI, A ;
VALLESABARCA, JA .
PHYSICAL REVIEW A, 1983, 28 (06) :3677-3678
[3]  
[Anonymous], 1982, Numerical analysis for semiconductor devices
[4]  
[Anonymous], SURFACE SCI INTRO
[5]  
Ashcroft N. W., 1973, SOLID STATE PHYS
[6]   FIELD REVERSAL IN THE NEGATIVE GLOW OF A DC GLOW-DISCHARGE [J].
BOEUF, JP ;
PITCHFORD, LC .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1995, 28 (10) :2083-2088
[7]   MONTE-CARLO SIMULATION OF AN ANALYTICAL GLOW-DISCHARGE - MOTION OF ELECTRONS, IONS AND FAST NEUTRALS IN THE CATHODE DARK SPACE [J].
BOGAERTS, A ;
VANSTRAATEN, M ;
GIJBELS, R .
SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY, 1995, 50 (02) :179-196
[8]  
BOGAERTS A, IN PRESS J APPL PHYS
[9]   ENERGY-TRANSFER FROM NOBLE-GAS IONS TO SURFACES - COLLISIONS WITH CARBON, SILICON, COPPER, SILVER, AND GOLD IN THE RANGE 100-4000 EV [J].
COUFAL, H ;
WINTERS, HF ;
BAY, HL ;
ECKSTEIN, W .
PHYSICAL REVIEW B, 1991, 44 (10) :4747-4758
[10]   LASER OPTOGALVANIC AND FLUORESCENCE STUDIES OF THE CATHODE REGION OF A GLOW-DISCHARGE [J].
DENHARTOG, EA ;
DOUGHTY, DA ;
LAWLER, JE .
PHYSICAL REVIEW A, 1988, 38 (05) :2471-2491