Transparent Conductive ITO/Ag/ITO Multilayer Films Prepared by Low Temperature Process and Physical Properties

被引：20

作者：

Kim, Tae Hoon ^{[1
]}

Choi, Bo Hye ^{[1
]}

Park, Jae Soung ^{[1
]}

Lee, Sang Mun ^{[2
]}

Lee, Yun Su ^{[2
]}

Park, Lee Soon ^{[1
,2
]}

机构：

[1] Kyungpook Natl Univ, Dept Polymer Sci, Mobile Display Res Ctr, Taegu 702701, South Korea

[2] Kyungpook Natl Univ, Adv Display Mfg Res Ctr, Taegu 702701, South Korea

来源：

MOLECULAR CRYSTALS AND LIQUID CRYSTALS | 2010年 / 520卷

关键词：

Ag thin interlayer; flexible OLED; flexible substrate; indium tin oxide (ITO); transparent conductive oxide (TCO);

D O I：

10.1080/15421400903584465

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

Transparent conductive ITO/Ag/ITO multilayer thin films were successfully deposited on polyethylene terephthalate (PET) substrates by RF sputtering of ITO layer and DC sputtering of Ag layer at room temperature. Electrical and optical properties of ITO/Ag/ITO multilayer films were strongly dependent on the thickness of Ag thin interlayer. The ITO (50 nm)/Ag (17 nm)/ITO (50 nm) multilayer films deposited on PET substrates exhibited lowest sheet resistance (6.7 Omega/square) and highest transmittance (83.2% at 550 nm). Especially, the sheet resistance of ITO/Ag/ITO multilayer films was superior to those of the commercial ITO (150 nm) films deposited on rigid glass substrates at high temperature. The ITO/Ag/ITO multilayer films coated PET substrate could be a good candidate for application to a transparent conductive oxide (TCO) electrode material for large size flexible OLED devices.

引用

页码：485 / 490

页数：6

共 11 条

[1] Transparent conducting GZO, Pt/GZO, and GZO/Pt/GZO thin films [J].