Near-field laser parallel nanofabrication of arbitrary-shaped patterns

被引：91

作者：

Guo, W.

Wang, Z. B. ^{[1
]}

Li, L.

Whitehead, D. J.

Luk'yanchuk, B. S.

Liu, Z.

机构：

[1] Univ Manchester, Sch Mat, Laser Proc Res Ctr, Sch Mech Aerosp & Civil Engn, Manchester M60 1QD, Lancs, England

[2] Univ Manchester, Sch Mat, Corros & Protect Ctr, Manchester M60 1QD, Lancs, England

[3] Univ Manchester, Sch Mech Aerosp & Civil Engn, Laser Proc Res Ctr, Manchester M60 1QD, Lancs, England

[4] Data Storage Inst, Singapore 117608, Singapore

[5] Univ Manchester, Corros & Protect Ctr, Sch Mat, Manchester M60 1QD, Lancs, England

来源：

APPLIED PHYSICS LETTERS | 2007年 / 90卷 / 24期

关键词：

D O I：

10.1063/1.2748035

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The authors present a simple and efficient technique for laser writing of arbitrary nanopatterns across a large surface area without using projection masks. It is based on the unique near-field focusing effect of a self-assembled particle array on the surface interacting with an angular incident laser beam. The spot resolution can be down to 80 nm. More than 6x10(6) nanolines and c-shaped uniform patterns were fabricated simultaneously over an area of 5x5 mm(2) by a few laser shots. (c) 2007 American Institute of Physics.

引用

页数：3

共 22 条

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