共 16 条
[4]
Huxley L. G., 1974, The Diffusion and Drift of Electrons in Gases
[5]
*IEE, 1982, 140 IEE 2
[7]
KOLOBOV VI, 1994, APPL PHYS LETT, V65, P37
[9]
EXPERIMENTAL INVESTIGATION AND FAST 2-DIMENSIONAL SELF-CONSISTENT KINETIC MODELING OF A LOW-PRESSURE INDUCTIVELY-COUPLED RF DISCHARGE
[J].
PHYSICAL REVIEW E,
1995, 51 (06)
:6063-6078
[10]
KINETIC-THEORY OF CHARGED-PARTICLE SWARMS IN NEUTRAL GASES
[J].
AUSTRALIAN JOURNAL OF PHYSICS,
1980, 33 (2B)
:343-448