Stretchable, Curvilinear Electronics Based on Inorganic Materials

被引:511
作者
Kim, Dae-Hyeong [3 ,4 ]
Xiao, Jianliang [2 ]
Song, Jizhou [7 ]
Huang, Yonggang [1 ,2 ]
Rogers, John A. [3 ,4 ,5 ,6 ]
机构
[1] Northwestern Univ, Dept Civil & Environm Engn, Evanston, IL 60208 USA
[2] Northwestern Univ, Dept Mech Engn, Evanston, IL 60208 USA
[3] Univ Illinois, Beckman Inst Adv Sci & Technol, Dept Mat Sci & Engn, Urbana, IL 61801 USA
[4] Univ Illinois, Frederick Seitz Mat Res Lab, Urbana, IL 61801 USA
[5] Univ Illinois, Beckman Inst Adv Sci & Technol, Dept Chem Mech Sci & Engn, Urbana, IL 61801 USA
[6] Univ Illinois, Beckman Inst Adv Sci & Technol, Dept Elect & Comp Engn, Urbana, IL 61801 USA
[7] Univ Miami, Dept Mech & Aerosp Engn, Coral Gables, FL 33146 USA
基金
美国国家科学基金会;
关键词
SINGLE-CRYSTAL SILICON; LIGHT-EMITTING-DIODES; HIGH-PERFORMANCE ELECTRONICS; THIN-FILM TRANSISTORS; SEMICONDUCTOR NANORIBBONS; INTEGRATED-CIRCUITS; SPHERICAL SURFACES; FABRICATION; DESIGN; INTERCONNECTS;
D O I
10.1002/adma.200902927
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
All commercial forms of electronic/optoelectronic technologies use planar, rigid substrates. Device possibilities that exploit bio-inspired designs or require intimate integration with the human body demand curvilinear shapes and/or elastic responses to large strain deformations. This article reviews progress in research designed to accomplish these outcomes with established, high-performance inorganic electronic materials and modest modifications to conventional, planar processing techniques. We outline the most well-developed strategies and illustrate their use in demonstrator devices that exploit unique combinations of shape, mechanical properties and electronic performance. We conclude with an outlook on the challenges and opportunities for this emerging area of materials science and engineering.
引用
收藏
页码:2108 / 2124
页数:17
相关论文
共 100 条
[21]  
HUANG K, 2006, P SPIE INT SOC OPT E, V6174
[22]   An approach to cost-effective, robust, large-area electronics using monolithic silicon [J].
Huang, Kevin ;
Dinyari, Rostam ;
Lanzara, Giulia ;
Kim, Jong Yon ;
Feng, Jianmin ;
Vancura, Cyril ;
Chang, Fu-Kuo ;
Peumans, Peter .
2007 IEEE INTERNATIONAL ELECTRON DEVICES MEETING, VOLS 1 AND 2, 2007, :217-+
[23]   Nonlinear analyses of wrinkles in a film bonded to a compliant substrate [J].
Huang, ZY ;
Hong, W ;
Suo, Z .
JOURNAL OF THE MECHANICS AND PHYSICS OF SOLIDS, 2005, 53 (09) :2101-2118
[24]   Microfabricated suspensions for electrical connections on the tunable elastomer membrane [J].
Hung, PJ ;
Jeong, KH ;
Liu, GL ;
Lee, LP .
APPLIED PHYSICS LETTERS, 2004, 85 (24) :6051-6053
[25]   Design and Manufacturing of Stretchable High-Frequency Interconnects [J].
Huyghe, Benoit ;
Rogier, Hendrik ;
Vanfleteren, Jan ;
Axisa, Fabrice .
IEEE TRANSACTIONS ON ADVANCED PACKAGING, 2008, 31 (04) :802-808
[26]   Fabrication of a cylindrical display by patterned assembly [J].
Jacobs, HO ;
Tao, AR ;
Schwartz, A ;
Gracias, DH ;
Whitesides, GM .
SCIENCE, 2002, 296 (5566) :323-325
[27]   Biologically inspired artificial compound eyes [J].
Jeong, KH ;
Kim, J ;
Lee, LP .
SCIENCE, 2006, 312 (5773) :557-561
[28]   Mechanics of precisely controlled thin film buckling on elastomeric substrate [J].
Jiang, Hanqing ;
Sun, Yugang ;
Rogers, John A. ;
Huang, Yonggang .
APPLIED PHYSICS LETTERS, 2007, 90 (13)
[29]   Finite deformation mechanics in buckled thin films on compliant supports [J].
Jiang, Hanqing ;
Khang, Dahl-Young ;
Song, Jizhou ;
Sun, Yugang ;
Huang, Yonggang ;
Rogers, John A. .
PROCEEDINGS OF THE NATIONAL ACADEMY OF SCIENCES OF THE UNITED STATES OF AMERICA, 2007, 104 (40) :15607-15612
[30]   Soft lithographic fabrication of an image sensor array on a curved substrate [J].
Jin, HC ;
Abelson, JR ;
Erhardt, MK ;
Nuzzo, RG .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2004, 22 (05) :2548-2551