Self-aligned cantilever positioning for on-substrate measurements using DVD pickup head

被引：15

作者：

Bosco, F. G. ^{[1
]}

Hwu, E. -T. ^{[2
]}

Keller, S. ^{[1
]}

Greve, A. ^{[1
]}

Boisen, A. ^{[1
]}

机构：

[1] Tech Univ Denmark, Dept Micro & Nanotechnol, DK-2800 Lyngby, Denmark

[2] Acad Sinica, Inst Phys, Taipei 11529, Taiwan

来源：

MICROELECTRONIC ENGINEERING | 2010年 / 87卷 / 5-8期

关键词：

Cantilever-based sensing; Microfabrication; SU-8; DVD pickup head; Chip holder;

D O I：

10.1016/j.mee.2009.12.064

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper, we present a novel approach for measuring the resonant frequency of cantilevers fabricated in polymeric materials. We re-designed the use of a commercial DVD-ROM pickup head and combine it with a glass-polymer substrate in order to obtain a light and portable device to measure the resonant frequency of polymer cantilevers. The use of the Pyrex-SU-8 clamping substrate allows an easy replacement of the cantilever chips and a fast alignment process to the DVD-ROM laser beam. We show measurements of thermal noise for SU-8 and TOPAS cantilevers in air and liquid environment. (C) 2009 Elsevier B.V. All rights reserved.

引用

页码：708 / 711

页数：4

共 7 条

[1] Development of nanomechanical biosensors for detection of the pesticide DDT [J].

Alvarez, M ;

Calle, A ;

Tamayo, J ;

Lechuga, LM ;

Abad, A ;

Montoya, A .

BIOSENSORS & BIOELECTRONICS, 2003, 18 (5-6) :649-653

[2] Highly sensitive polymer-based cantilever-sensors for DNA detection [J].

Calleja, M ;

Nordström, M ;

Alvarez, M ;

Tamayo, J ;

Lechuga, LM ;

Boisen, A .

ULTRAMICROSCOPY, 2005, 105 (1-4) :215-222

[3]

GREVE A, 2009, INT WORKSH NONM CANT

[4] Modelling the characteristics of a photodetector in a DVD player [J].

Hnilicka, B ;

Voda, A ;

Schröder, HJ .

SENSORS AND ACTUATORS A-PHYSICAL, 2005, 120 (02) :494-506

[5] Simultaneous detection of translational and angular displacements of micromachined elements [J].

Hwu, E. -T. ;

Hung, S. -K. ;

Yang, C. -W. ;

Hwang, I. -S. ;

Huang, K. -Y. .

APPLIED PHYSICS LETTERS, 2007, 91 (22)

[6] Measurement of cantilever displacement using a compact disk/digital versatile disk pickup head [J].

Hwu, ET ;

Huang, KY ;

Hung, SK ;

Hwang, IS .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2006, 45 (3B) :2368-2371

[7] SU-8 cantilevers for bio/chemical sensing;: Fabrication, characterisation and development of novel read-out methods [J].

Nordstrom, Maria ;

Keller, Stephan ;

Lillemose, Michael ;

Johansson, Alicia ;

Dohn, Soren ;

Haefliger, Daniel ;

Blagoi, Gabriela ;

Havsteen-Jakobsen, Mogens ;

Boisen, Anja .

SENSORS, 2008, 8 (03) :1595-1612

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