Solid state optical gyrometer integrated on silicon

被引：22

作者：

Mottier, P ^{[1
]}

Pouteau, P ^{[1
]}

机构：

[1] CEA, LETI, Dept Microtechnol, F-38054 Grenoble 09, France

来源：

ELECTRONICS LETTERS | 1997年 / 33卷 / 23期

关键词：

optical sensors; fibre optic gyroscopes;

D O I：

10.1049/el:19971319

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The authors have demonstrated for the first lime the feasibility of solid slate optical gyrometers. They consist of a silica waveguide coil fully integrated on a silicon substrate and operating at 850 nm wavelength. A typical sensitivity of 1 degrees/s(-1) and a full linearity al least between -900 and 900 degrees/s(-1) have been obtained so far. This first result could open the way to further improvements in order to achieve low cost rotation sensors.

引用

页码：1975 / 1977

页数：3