Guided self-assembly of Au nanocluster arrays electronically coupled to semiconductor device layers

We report the controlled deposition of close-packed monolayer arrays of similar to 5-nm-diam Au clusters within patterned regions on GaAs device layers, thus demonstrating guided self-assembly on a substrate which can provide interesting semiconductor device characteristics. Uniform nanometer scale ordering of the clusters is achieved by a chemical self-assembly process, while micron scale patterning is provided by a soft lithographic technique. Scanning tunneling microscope imaging and current-voltage spectroscopy indicate the Au nanoclusters are strongly coupled electronically into the underlying semiconductor substrate while exhibiting only weak electronic coupling in the lateral plane. (C) 2000 American Institute of Physics. [S0003-6951(00)00329-6].