Sorptive polymeric materials and photopatterned films for gas phase chemical microsensors

被引:17
作者
Grate, JW [1 ]
Nelson, DA [1 ]
机构
[1] Pacific NW Natl Lab, Richland, WA 99352 USA
关键词
microsensor; acoustic wave; vapor; sorption; polymer; photopattern;
D O I
10.1109/JPROC.2003.813575
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The selective layer on a gas phase chemical microsensor plays a critical role in the sensitivity and selectivity of the sensor's response. Polymers can rapidly and reversibly absorb vapor molecules. As sorptive layers on chemical sensors, polymers are useful for a variety of chemical microsensor types and transduction mechanisms, either as is or as composites with conductive particles or dyes. The performance requirements for polymers are described in terms of their chemical and physical properties. A versatile synthetic approach for preparing sensing polymers has been developed using hydrosilylation chemistry to prepare carbosiloxane polymers. Polymers with diverse chemical selectivities have been prepared by this method. Furthermore, sorptive polymer materials can be photopatterned into defined areas on surfaces using a photoactivated catalyst and hydrosilylation chemistry. Polymer films with diverse chemical selectivities have been patterned with this new method.
引用
收藏
页码:881 / 889
页数:9
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