Large-area, low-noise amorphous silicon imaging system

被引:9
作者
Apte, RB [1 ]
Street, RA [1 ]
Ready, SE [1 ]
Jared, DA [1 ]
Moore, AM [1 ]
Weisfield, RL [1 ]
Rodericks, TA [1 ]
Granberg, TA [1 ]
机构
[1] Xerox PARC, Palo Alto, CA USA
来源
SOLID STATE SENSOR ARRAYS: DEVELOPMENT AND APPLICATIONS II | 1998年 / 3301卷
关键词
amorphous silicon; thin film transistor; double correlated sampling; active matrix imager; readout noise; linearity; x-rays; noise power spectrum;
D O I
10.1117/12.304549
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Two dimensional amorphous silicon arrays can be used for medical imaging, non-destructive testing, and high-speed document scanning. We have built a 200 spi imaging system with an active area containing 2304 x 3200 pixels (29.2 x 40.6 cm(2)), the largest amorphous silicon imaging system described to date. Packaged with the array are peripheral electronics which include active matrix drivers, charge sensitive amplifiers, two 12 bit A/D converters, and control logic. Digital data travel via fiber to a frame grabber in a personal computer. Software includes gain/offset corrections, line and pixel corrections, window and level controls, and a user interface. Through a combination of layout optimization, amplifier design, and system timing, we have demonstrated a noise level of 1.5 KeRMS and a signal to noise ratio of 1900.
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页码:2 / 8
页数:7
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