Vertical surround-gated silicon nanowire impact ionization field-effect transistors

被引:84
作者
Bjoerk, M. T. [1 ]
Hayden, O. [1 ]
Schmid, H. [1 ]
Riel, H. [1 ]
Riess, W. [1 ]
机构
[1] IBM Res GmbH, Zurich Res Lab, CH-8803 Ruschlikon, Switzerland
关键词
D O I
10.1063/1.2720640
中图分类号
O59 [应用物理学];
学科分类号
摘要
One of the fundamental limits in the scaling of metal oxide semiconductor field-effect transistor technology is the room-temperature (RT) limit of similar to 60 mV/decade in the inverse subthreshold slope. Here, the authors demonstrate vertical integration of a single surround-gated silicon nanowire field-effect transistor with an inverse subthreshold slope as low as 6 mV/decade at RT that spans four orders of magnitude in current. Operation of the device is based on avalanche breakdown in a partially gated vertical nanowire, epitaxially grown using the vapor-liquid-solid method. Low-power logic based on impact ionization field-effect transistors in combination with a vertical architecture is very promising for future high-performance ultrahigh-density circuits. (c) 2007 American Institute of Physics.
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页数:3
相关论文
共 16 条
[1]  
Abelé N, 2005, INT EL DEVICES MEET, P1075
[2]  
[Anonymous], 1981, PHYS SEMICONDUCTOR D
[3]   Band-to-band tunneling in carbon nanotube field-effect transistors [J].
Appenzeller, J ;
Lin, YM ;
Knoch, J ;
Avouris, P .
PHYSICAL REVIEW LETTERS, 2004, 93 (19) :196805-1
[4]   Benchmarking nanotechnology for high-performance and low-power logic transistor applications [J].
Chau, R ;
Datta, S ;
Doczy, M ;
Doyle, B ;
Jin, J ;
Kavalieros, J ;
Majumdar, A ;
Metz, M ;
Radosavljevic, M .
IEEE TRANSACTIONS ON NANOTECHNOLOGY, 2005, 4 (02) :153-158
[5]   A comprehensive analytical subthreshold swing (S) model for double-gate MOSFETs [J].
Chen, Q ;
Agrawal, B ;
Meindl, JD .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 2002, 49 (06) :1086-1090
[6]  
Choi WY, 2005, INT EL DEVICES MEET, P975
[7]   Impact ionization MOS (I-MOS) - Part I: Device and circuit simulations [J].
Gopalakrishnan, K ;
Griffin, PB ;
Plummer, JD .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 2005, 52 (01) :69-76
[8]  
Gopalakrishnan K, 2002, INTERNATIONAL ELECTRON DEVICES 2002 MEETING, TECHNICAL DIGEST, P289, DOI 10.1109/IEDM.2002.1175835
[9]   A vertical MOS-gated Esaki tunneling transistor in silicon [J].
Hansch, W ;
Fink, C ;
Schulze, J ;
Eisele, I .
THIN SOLID FILMS, 2000, 369 (1-2) :387-389
[10]   Fully depleted nanowire field-effect transistor in inversion mode [J].
Hayden, Oliver ;
Bjoerk, Mikael T. ;
Schmid, Heinz ;
Riel, Heike ;
Drechsler, Ute ;
Karg, Siegfried F. ;
Loertscher, Emanuel ;
Riess, Walter .
SMALL, 2007, 3 (02) :230-234