Production and wetting properties of fluorinated diamond-like carbon coatings

被引:107
作者
Butter, RS
Waterman, DR
Lettington, AH
Ramos, RT
Fordham, EJ
机构
[1] Schlumberger Cambridge Res Ltd, Cambridge CB3 0EL, England
[2] Univ Reading, JJ Thomson Phys Lab, Reading RG6 2AF, Berks, England
关键词
diamond-like carbon; fluorinated DLC; coatings; deposition;
D O I
10.1016/S0040-6090(97)00337-4
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The control of hydrophobicity of diamond-like carbon (DLC) surfaces has been studied by the use of CF4 etching plasma and by the deposition of fluorinated DLC (a-C:F) using mixtures of CF4 with butane and acetylene. The results indicate that the degree of fluorination (F:C ratio), and the hydrophobicity of the surface depend critically on both the elemental composition of the gas feedstock and the deposition parameters. There is a correlation between high levels of fluorination and hydrophobicity, although at high F:C ratios, the mechanical stability of the fluorinated surface may be compromised. A possible mechanism for the production of hydrophobic fluorinated surfaces is proposed. (C) 1997 Elsevier Science S.A.
引用
收藏
页码:107 / 113
页数:7
相关论文
共 35 条
[1]   PROPERTIES OF FLUOROCARBON FILMS PREPARED BY RF SPUTTERING AND PLASMA POLYMERIZATION IN INERT AND ACTIVE GAS [J].
BIEDERMAN, H ;
OJHA, SM ;
HOLLAND, L .
THIN SOLID FILMS, 1977, 41 (03) :329-339
[2]  
BLAKE TD, 1984, SURFACTANTS, pCH10
[3]   PROPERTIES OF MICROMETER-THICK PLASMA-POLYMERIZED TETRAFLUOROETHYLENE FILMS [J].
BUTLER, MA ;
BUSS, RJ ;
GALUSKA, A .
JOURNAL OF APPLIED PHYSICS, 1991, 70 (04) :2326-2332
[4]  
BUTTER R, 1995, NEW DIAMOND DIAMOND, P353
[5]  
BUTTER R, 1995, THESIS U READING
[6]  
Butter R S, 1994, ADV SCI TECHNOL, V6, P353
[7]  
CATHERINE Y, 1989, MATER SCI FORUM, V52, P175
[8]   FLUORINATED DIAMOND-LIKE CARBON-FILMS DEPOSITS FROM RADIOFREQUENCY GLOW-DISCHARGE IN A TRIODE REACTOR [J].
DAGOSTINO, R ;
LAMENDOLA, R ;
FAVIA, P ;
GIQUEL, A .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1994, 12 (02) :308-313
[9]  
ENKE K, 1987, EMRS S P, V17, P117
[10]  
Fink J., 1987, EMRS S P, V17, P475