X-ray refractive planar lens with minimized absorption

被引：127

作者：

Aristov, V ^{[1
]}

Grigoriev, M

Kuznetsov, S

Shabelnikov, L

Yunkin, V

Weitkamp, T

Rau, C

Snigireva, I

Snigirev, A

Hoffmann, M

Voges, E

机构：

[1] Russian Acad Sci, Inst Microelect Technol, Chernogolovka 142432, Russia

[2] European Synchrotron Radiat Facil, F-38043 Grenoble, France

[3] Univ Dortmund, D-44227 Dortmund, Germany

来源：

APPLIED PHYSICS LETTERS | 2000年 / 77卷 / 24期

关键词：

D O I：

10.1063/1.1332401

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Silicon refractive planar parabolic lenses with minimized absorption were fabricated by a combination of photolithography and dry-etching techniques. Focusing and spectral properties of the lenses were studied with synchrotron radiation in the energy range 8-25 keV at the European Synchrotron Radiation Facility. A focal spot of 1.8 mum with a gain of 18.5 and transmission of more then 80% was measured at 15.6 keV. The spectral characteristics were analyzed taking into account material dispersion and photon-energy attenuation in the hard x-ray range. (C) 2000 American Institute of Physics. [S0003-6951(00)00151-0].

引用

页码：4058 / 4060

页数：3

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