Measurement of small vibration amplitudes of a rough surface by an interferometer with a self-pumped phase-conjugate mirror

被引：15

作者：

Wang, XZ ^{[1
]}

Sasaki, O

Suzuki, T

Maruyama, T

机构：

[1] Niigata Univ, Fac Engn, Niigata 9502181, Japan

[2] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Shanghai 201800, Peoples R China

来源：

APPLIED OPTICS | 2000年 / 39卷 / 25期

关键词：

D O I：

10.1364/AO.39.004593

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

The application of a Michelson interferometer with a self-pumped phase-conjugate mirror to measure small vibration amplitudes of a rough surface is described. The distorted wave front of the light that is diffusely reflected from the rough surface is restored by phase conjugation to provide an interference signal with a high signal-to-noise ratio. The vibration amplitudes of a stainless-steel sample are measured with a precision of similar to 5 nm. (C) 2000 Optical Society of America OCIS codes: 120.3180, 190.5040, 120.7280.

引用

收藏

页码：4593 / 4597

页数：5

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