Laser cleaning of surface contaminants

被引：125

作者：

Tam, AC

Park, HK

Grigoropoulos, CP

机构：

[1] IBM Corp, Almaden Res Ctr, San Jose, CA 95120 USA

[2] IBM Corp, Mfg Technol Ctr, Boca Raton, FL 33431 USA

[3] Univ Calif Berkeley, Dept Mech Engn, Berkeley, CA 94720 USA

来源：

APPLIED SURFACE SCIENCE | 1998年 / 127卷

关键词：

steam laser cleaning; surface contaminants; dry laser cleaning;

D O I：

10.1016/S0169-4332(97)00788-5

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Laser cleaning effect can be produced on a surface using pulsed laser irradiation, with pulse duration typically 1 to 100 ns, fluence typically tens to hundreds of mJ/cm(2), and wavelengths typically in the 200 to 300 nm range. A thin liquid film can be used to enhance the removal efficiency of small particulates; this is called 'steam laser cleaning'. A manufacturing worthy tool that can provide both steam laser cleaning as well as dry laser cleaning is built and tested successfully. The basic mechanism of steam laser cleaning is studied. (C) 1998 Elsevier Science B.V.

引用

页码：721 / 725

页数：5

共 10 条

[1]

BARDINA J, 1988, PARTICLES SURFACES, V1

[2] PHOTODEFLECTION PROBING OF THE EXPLOSION OF A LIQUID-FILM IN CONTACT WITH A SOLID HEATED BY PULSED EXCIMER-LASER IRRADIATION [J].