Retroreflective grating analysis versus physical measurements of surface contour

被引：13

作者：

Zhang, XZ ^{[1
]}

North, WP ^{[1
]}

机构：

[1] Univ Windsor, Dept Mech & Mat Engn, Windsor, ON N9B 3P4, Canada

来源：

OPTICAL ENGINEERING | 1998年 / 37卷 / 05期

关键词：

retroreflection; grating analysis; noncontact measurement; surface contour;

D O I：

10.1117/1.601661

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

The technique of retroreflective grating analysis is presented to measure surface contour. This noncontacting optical method can detect a dent with maximum depth less than 10 mu m. A comparison with some physical measuring systems indicates that it has advantage over such contacting measurements, especially for specular surfaces. (C) 1998 Society of Photo-Optical instrumentation Engineers. [S0091-3286(95)03105-5].

引用

页码：1464 / 1467

页数：4

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