New results in pulsed laser deposition of poly-methyl-methacrylate thin films

被引:26
作者
Cristescu, R
Socol, G
Mihailescu, IN
Popescu, M
Sava, F
Ion, E
Morosanu, CO
Stamatin, I
机构
[1] Natl Inst Lasers Plasma & Radiat Phys, RO-76900 Bucharest, Romania
[2] Natl Inst Mat Phys, RO-76900 Bucharest, Romania
[3] Univ Bucharest, Dept Phys, RO-76900 Bucharest, Romania
关键词
polymer thin films; poly-methyl-methacrylate; pulsed laser deposition;
D O I
10.1016/S0169-4332(02)01415-0
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Thin organic films based on poly-methyl-methacrylate (PMMA) polymer have been obtained by pulsed laser deposition (PLD) on silicon substrates. The films were characterized by X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), atomic force microscopy (AFM) and Raman spectroscopy (RS). We observed that the film composition and structure depend on the laser fluence and on the temperature of the substrate during deposition. (C) 2002 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:645 / 650
页数:6
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