A 0.13 μm DRAM technology for giga bit density stand-alone and embedded DRAMs

被引:30
作者
Kim, KN [1 ]
Chung, TY [1 ]
Jeong, HS [1 ]
Moon, JT [1 ]
Park, YW [1 ]
Jeong, GT [1 ]
Lee, KH [1 ]
Koh, GH [1 ]
Shin, DW [1 ]
Hwang, YS [1 ]
Kwak, DW [1 ]
Uh, HS [1 ]
Ha, DW [1 ]
Lee, JW [1 ]
Shin, SH [1 ]
Lee, MH [1 ]
Chun, YS [1 ]
Lee, JK [1 ]
Park, BJ [1 ]
Oh, JH [1 ]
Lee, JG [1 ]
Lee, SH [1 ]
机构
[1] Samsung Elect Co, Memory Dev Business, Technol Dev, Yongin City, Kyungki Do, South Korea
来源
2000 SYMPOSIUM ON VLSI TECHNOLOGY, DIGEST OF TECHNICAL PAPERS | 2000年
关键词
D O I
10.1109/VLSIT.2000.852748
中图分类号
TP3 [计算技术、计算机技术];
学科分类号
0812 ;
摘要
引用
收藏
页码:10 / 11
页数:2
相关论文
共 2 条
[1]  
KIM KN, 1997, S VLSI TECH, P9
[2]  
KIM KN, 1998, S VLSI TECH, P16