Coherent coupling of vertical-cavity surface-emitting laser arrays and efficient beam combining by diffractive optical elements:: concept and experimental verification

被引:37
作者
Hergenhan, G
Lücke, B
Brauch, U
机构
[1] Detsch Zentrum Luft & Raumfahrt EV, Phys Tech Inst, D-70569 Stuttgart, Germany
[2] Univ Stuttgart, Inst Strahlwerkzeuge, D-70569 Stuttgart, Germany
关键词
D O I
10.1364/AO.42.001667
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
A, phase-locked diode-laser system based on master-slave coupling of two-dimensional vertical-cavity surface-emitting laser (VCSEL) arrays by injection locking is presented. Frequencies and phases are adjusted by laser-trimmed microresistors. Additional beam-transformation optics consisting of two diffractive optical elements (DOEs) and a Fourier lens concentrates most of the far-field power in a nearly diffraction-limited beam. Both the VCSEL array and the microlens array are monolithically integrated and mounted in a compact module. With an array of 21 slave lasers a system coherence of 95% (for several hours) and of nearly 90% (for several months) has been demonstrated without any active phase control. The scalability of the output power has been verified by locking of an array of 77 slave lasers with a system coherence of 78%. The optical system efficiency is 20-23%; with beam-transformation optics this efficiency could be improved to 44%. (C) 2003 Optical Society of America.
引用
收藏
页码:1667 / 1680
页数:14
相关论文
共 16 条
[1]   Replication of microoptical profiles in ORMOCER(R) and other polymers [J].
Anke, I ;
Kley, EB ;
Hubner, H ;
Schnabel, B ;
Pohlmann, R .
MICRO-OPTICAL TECHNOLOGIES FOR MEASUREMENT, SENSORS, AND MICROSYSTEMS, 1996, 2783 :325-332
[2]   Power-scalable system of phase-locked single-mode diode lasers [J].
Bartelt-Berger, L ;
Brauch, U ;
Giesen, A ;
Huegel, H ;
Opower, H .
APPLIED OPTICS, 1999, 38 (27) :5752-5760
[3]  
Born M., 1999, PRINCIPLES OPTICS
[4]   HIGH-POWER MONOLITHIC PHASE-LOCKED ARRAYS OF ANTIGUIDED SEMICONDUCTOR DIODE-LASERS [J].
BOTEZ, D .
IEE PROCEEDINGS-J OPTOELECTRONICS, 1992, 139 (01) :14-23
[5]   Experiments on the scalability of the coherent coupling of VCSEL arrays [J].
Hergenhan, G ;
Lücke, B ;
Brauch, U .
VERTICAL-CAVITY SURFACE-EMITTING LASERS VI, 2002, 4649 :158-167
[6]   Fabrication and properties of refractive micro-optical profiles for lenses, lens arrays and beam shaping elements [J].
Kley, EB ;
Cumme, M ;
Wittig, LC ;
Tünnermann, A .
ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGY 2000, 2000, 4231 :144-152
[7]   Continuous profile writing by electron and optical lithography [J].
Kley, EB .
MICROELECTRONIC ENGINEERING, 1997, 34 (3-4) :261-298
[8]   Design and characteristics of high-power (>0.5-W CW) diode-pumped vertical-external-cavity surface-emitting semiconductor lasers with circular TEM00 beams [J].
Kuznetsov, M ;
Hakimi, F ;
Sprague, R ;
Mooradian, A .
IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, 1999, 5 (03) :561-573
[9]  
LEVY J, 1995, P SOC PHOTO-OPT INS, V2382, P58, DOI 10.1117/12.208463
[10]   Phase tuning of injection-locked VCSELs [J].
Lücke, B ;
Hergenhan, G ;
Brauch, U ;
Giesen, A .
IEEE PHOTONICS TECHNOLOGY LETTERS, 2001, 13 (02) :100-102