Microlenses and microlens arrays formed on a glass plate by use of a CO2 laser

被引:94
作者
Wakaki, M
Komachi, Y
Kanai, G
机构
[1] Tokai Univ, Dept Electrophotoopt Engn, Kanagawa 25912, Japan
[2] Machida Endoscope Co Ltd, Tokyo, Japan
来源
APPLIED OPTICS | 1998年 / 37卷 / 04期
关键词
D O I
10.1364/AO.37.000627
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Microlenses and microlens arrays were formed directly on a surface of a glass plate by use of a CO2 laser. When the surface of a glass plate is heated locally to a working point of the glass material by use of a focused CO2 laser beam, it tends to become a hyperboloid owing to surface tension, which results in a microlens. A profile of the microlens was measured with an ultrahigh accurate three-dimensional profilometer (Model UA3P, Matsusita Electric Industrial Company Ltd.) that utilizes a specially designed atomic force microscope. An intensity profile and a spot diameter at the focus of the microlens were measured with a microscope and a CCD system utilizing a He-Ne laser as a Light source. The focused spot FWHM diameter of 1.35 mu m was obtained, and the modulation transfer function was derived from the spot profile. Microlens arrays were also fabricated and characterized. (C) 1998 Optical Society of America.
引用
收藏
页码:627 / 631
页数:5
相关论文
共 8 条
  • [1] MICROLENS ARRAYS PRODUCED BY A PHOTOLYTIC TECHNIQUE
    BORRELLI, NF
    MORSE, DL
    [J]. APPLIED OPTICS, 1988, 27 (03): : 476 - 479
  • [2] OIKAWA M, 1981, JPN J APPL PHYS, V20, pL291
  • [3] FORMATION OF A SPHERICAL LENS AT OPTICAL FIBER ENDS WITH A CO2-LASER
    PAEK, UC
    WEAVER, AL
    [J]. APPLIED OPTICS, 1975, 14 (02): : 294 - 298
  • [4] LASER MICROMACHINING OF EFFICIENT FIBER MICROLENSES
    PRESBY, HM
    BENNER, AF
    EDWARDS, CA
    [J]. APPLIED OPTICS, 1990, 29 (18): : 2692 - 2695
  • [5] SUZUKI K, 1987, REV LASER ENG, V15, P113
  • [6] SUZUKI K, 1996, REV LASER ENG, V14, P880
  • [7] VEIKO VP, 1991, P SOC PHOTO-OPT INS, V1544, P152, DOI 10.1117/12.49383
  • [8] VEIKO VP, 1993, P SOC PHOTO-OPT INS, V1992, P159, DOI 10.1117/12.165684