Micromachined accelerometer based on convection heat transfer

被引：71

作者：

Leung, AM ^{[1
]}

Jones, J ^{[1
]}

Czyzewska, E ^{[1
]}

Chen, J ^{[1
]}

Woods, B ^{[1
]}

机构：

[1] Simon Fraser Univ, Sch Engn Sci, Burnaby, BC V5A 1S6, Canada

来源：

MICRO ELECTRO MECHANICAL SYSTEMS - IEEE ELEVENTH ANNUAL INTERNATIONAL WORKSHOP PROCEEDINGS | 1998年

关键词：

D O I：

10.1109/MEMSYS.1998.659830

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

A micromachined thermal accelerometer that is simple, reliable, and inexpensive to make has been developed at Simon Fraser University. The operating principle of this accelerometer is based on the free-convection heat transfer of a small hot air bubble in a sealed chamber. An experimental device that requires only four masking steps to fabricate has been built. This device has demonstrated a 0.6 milli-g sensitivity that can theoretically be extended to sub-micro-g level. A 2-axis accelerometer based on the same operating principle has also been fabricated and tested.

引用

页码：627 / 630

页数：4