Calibration of multi-axis MEMS force sensors using the shape-from-motion method

被引：46

作者：

Kim, Keekyoung ^{[1
]}

Sun, Yu

Voyles, Richard M.

Nelson, Bradley J.

机构：

[1] Univ Toronto, Dept Mech & Ind Engn, Toronto, ON M5S 3G8, Canada

[2] Univ Denver, Dept Comp Engn, Denver, CO 80208 USA

[3] ETH, Dept Mech, CH-8092 Zurich, Switzerland

[4] ETH, Proc Engn Dept, CH-8092 Zurich, Switzerland

来源：

IEEE SENSORS JOURNAL | 2007年 / 7卷 / 3-4期

基金：

加拿大自然科学与工程研究理事会;

关键词：

calibration; microelectromechanical systems (MEMS) force sensor; multi-axis; shape-from-motion;

D O I：

10.1109/JSEN.2006.890141

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Precise calibration of multi-axis microelectromechanical systems (MEMS) force sensors is difficult for several reasons, including the need to apply many known force vectors at precise orientations at the micro- and nanoNewton (nN) force scales, and the risk of damaging the small, fragile microdevices. To tackle these challenges, this paper introduces the shape-from-motion calibration method. A new design of a two-axis MEMS capacitive force sensor with high linearity and nN resolutions is presented. Structural-electrostatic coupled-field simulations are conducted in order to optimize the sensor design. The designed sensor is calibrated with the shape-from-motion method, the least-squares method as well as the gravity-based method for comparison purposes. Calibration results demonstrate that the shape-from-motion method provides a rapid, practical, and accurate technique for calibrating multi-axis MEMS sensors.

引用

页码：344 / 351

页数：8

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