Magnetic thin-film inductors for RF-integrated circuits

被引：53

作者：

Yamaguchi, M

Suezawa, K

Takahashi, Y

Arai, KI

Kikuchi, S

Shimada, Y

Tanabe, S

Ito, K

机构：

[1] Tohoku Univ, Elect Commun Res Inst, Aoba Ku, Sendai, Miyagi 9808577, Japan

[2] Tohoku Gakuin Univ, Fac Engn, Tagajo, Miyagi 9858537, Japan

[3] Tohoku Gakuin Univ, Res Inst Sci Instrumentat, Sendai, Miyagi 9808577, Japan

[4] Mitsubishi Elect Corp, ATC, Amagasaki, Hyogo 6610001, Japan

来源：

JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS | 2000年 / 215卷

关键词：

thin-film inductor; RF-integrated circuits; spiral coil; quality factor; micropatterning; ferromagnetic resonance; complex permeability; micromagnetic device;

D O I：

10.1016/S0304-8853(00)00293-6

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Thin-film spiral inductors with micropatterned Fe-Al-O and CoNbZr films for the impedance matching elements in 1 GHz-drive mobile communication handset application have been demonstrated. Narrow slit trains along the easy axis direction control the ferromagnetic resonance frequency through the change of shape anisotropy energy and magnetostatic energy. The inductance was advantageous over the air-core spiral while Q was almost the same. (C) 2000 Published by Elsevier Science B.V. All rights reserved.

引用

页码：807 / 810

页数：4

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