共 6 条
[1]
Appleton B. R., 1984, Ion implantation and beam processing, P189
[2]
Sze SM, 1981, PHYSICS SEMICONDUCTO, V2, P89
[3]
TAKAGI T, 1987, PHYSICS THIN FILMS, V13
[4]
EFFECT OF SUBSTRATE-TEMPERATURE ON THE DEPOSITION OF POLYTETRAFLUOROETHYLENE BY AN IONIZATION-ASSISTED EVAPORATION METHOD
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1995, 13 (05)
:2318-2324
[5]
USUI H, 1994, MATER RES SOC SYMP P, V316, P935, DOI 10.1557/PROC-316-935