Oblique alignment of columns of self-organized Ge/Si(001) islands in multilayer structure

被引:14
作者
Huang, CJ [1 ]
Li, DZ [1 ]
Cheng, BW [1 ]
Yu, JZ [1 ]
Wang, QM [1 ]
机构
[1] Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China
关键词
D O I
10.1063/1.1322372
中图分类号
O59 [应用物理学];
学科分类号
摘要
Ge/Si multilayer structures with a bimodal distribution of the island spacing in the first layer have been investigated by atomic-force microscopy and transmission electron microscopy. Besides the vertical alignment, some oblique alignments of stacked islands are observed. The presence of the elastic interaction between islands is responsible for the oblique alignment of stacked islands. (C) 2000 American Institute of Physics. [S0003-6951(00)04644-1].
引用
收藏
页码:2852 / 2854
页数:3
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