Transmission lines and passive elements for multilayer coplanar circuits on silicon

被引:40
作者
Warns, C [1 ]
Menzel, W
Schumacher, H
机构
[1] Univ Ulm, Dept Microwave Techniques, D-89069 Ulm, Germany
[2] Univ Ulm, Dept Electron Devices & Circuits, D-89069 Ulm, Germany
关键词
coplanar; multilayer; passive components; silicon; transmission lines;
D O I
10.1109/22.668672
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this paper, propagation properties of both standard and multilayer coplanar lines on different types of silicon substrates, as well as a number of quasi-lumped and stub-type circuit elements, are investigated, For the transmission lines, emphasis is placed on losses, As examples for circuit elements, a lumped pal allel resonator and a high-low impedance low-pass Rites are demonstrated.
引用
收藏
页码:616 / 622
页数:7
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