Ordered iron oxide nanotube arrays of controlled geometry and tunable magnetism by atomic layer deposition

被引:210
作者
Bachmann, Julien
Jing, Jing
Knez, Mato
Barth, Sven
Shen, Hao
Mathur, Sanjay
Goesele, Ulrich
Nielsch, Kornelius
机构
[1] Max Planck Inst Microstruct Phys, D-06120 Halle, Germany
[2] Leibniz Inst New Mat, CVD Div, D-66041 Saarbrucken, Germany
关键词
D O I
10.1021/ja072465w
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Iron oxide nanotubes of 50-150 nm outer diameter and 2-20 nm wall thickness are prepared in ordered arrays. Atomic layer deposition (ALD) of Fe2O3 from the precursor iron(III) tert-butoxide at 130-180 degrees C yields very smooth coverage of the pore walls of anodic alumina templates, with thickness growth of 0.26(+/- 0.04) A per cycle. The reduced Fe3O4 tubes are hard ferromagnets, and variations of the wall thickness d(w) have marked consequences on the magnetic response of the tube arrays. For 50 nm outer diameter, tubes of d(w) = 13 nm yield the largest coercive field (H-c > 750 Oe), whereas lower coercivities are observed on both the thinner and thicker sides of this optimum.
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页码:9554 / +
页数:3
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