A hybrid technology for miniaturised inductive device applications

We have fabricated two-dimensional inductive del ices by integrating micropatterned magnetic foils of high permeability (mu(r) = 100 000) with winding patterns realised in printed circuit boards (PCBs) and flex-foil technology. We realise relatively high inductances of 1-10 mu H for transformer type devices and a sensitivity of 60 V/T at 30 kHz for fluxgate magnetic induction sensing devices. The same type of device is also used as a current sensor; here we typically find sensitivities of 10 mV/A for excitation currents of a few 100 mA. Rie think our technology opens the way to a new class of functional and economic sensing devices. (C) 2000 Elsevier Science S.A. All rights reserved.