Novel proton exchange membrane thin-film fuel cell for microscale energy conversion

Thin-film, proton exchange membrane fuel cells are developed using photolithographic patterning, physical vapor deposition, and spin-cast deposition techniques. In this study, micrometer-thick layers of nickel (Ni) and platinum (Pt) electrodes, as well as the proton conducting electrolyte layer of perfluoronated sulfonic acid, are synthesized. The anode layer is conductive to pass the electric current and provides mechanical support to the electrolyte and cathode layer that enables combination of the reactive gases. The morphology desired for both the anode and cathode layers facilitates generation of maximum current density from the fuel cell. For these purposes, the parameters of the deposition process and post-deposition patterning are optimized for continuous porosity across both electrode layers. The power output generated through current-voltage measurement is characterized at various temperatures in the range of 60-90 degrees C using dilute (4%) hydrogen fuel. (C) 2000 American Vacuum Society. [S0734-2101(00)05304-5].