Laser-assisted growth of diamond particulates on a silicon surface from a cyclohexane liquid

被引：35

作者：

Lu, YF

Huang, SM

Wang, XB

Shen, ZX

机构：

[1] Natl Univ Singapore, Dept Elect Engn, Singapore 119260, Singapore

[2] Natl Univ Singapore, Data Storage Inst, Singapore 119260, Singapore

[3] Natl Univ Singapore, Dept Phys, Singapore 119260, Singapore

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1998年 / 66卷 / 05期

关键词：

D O I：

10.1007/s003390050710

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Excimer laser irradiation of a single-crystalline silicon surface immersed under cyclohexane liquid is demonstrated to form diamond particulates. Scanning electron microscopy and Raman spectroscopy have been used to study the deposited particulates. A mechanism based on the condensation of energetic carbon atoms into diamond-like films is proposed to explain the process.

引用

页码：543 / 547

页数：5

共 20 条

[1] DENSE DIAMONDLIKE HYDROCARBONS AS RANDOM COVALENT NETWORKS [J].