Fabrication of slot antenna coupled warm carrier detectors for millimeter wave radiation

被引：3

作者：

Yasuoka, Y

Shimizu, T

Gamo, K

机构：

[1] Natl Def Acad, Dept Elect Engn, Yokosuka, Kanagawa 239, Japan

[2] Osaka Univ, Fac Engn Sci, Toyonaka, Osaka 239, Japan

来源：

MICROELECTRONIC ENGINEERING | 1998年 / 42卷

关键词：

D O I：

10.1016/S0167-9317(98)00103-8

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Slot antenna coupled thin film warm carrier devices were fabricated by an electron beam lithographic method associated with precisely controlled dry etching, and detection and mixing properties were investigated at 47 and 94GHz. The experimental results indicate that the fabricated slot antenna operates as designed, and that the fabricated device operates as a detector and rectifies the millimeter wave signals induced on the antenna with a nonlinear I-V characteristic.

引用

页码：445 / 448

页数：4

共 7 条

[1]

DANIEL HV, 1982, APPL PHYS LETT, V4, P313

[2] Mixing of 30 THz laser radiation with nanometer thin-film Ni-NiO-Ni diodes and integrated bow-tie antennas [J].

Fumeaux, C ;

Herrmann, W ;

Rothuizen, H ;

DeNatale, P ;

Kneubuhl, FK .

APPLIED PHYSICS B-LASERS AND OPTICS, 1996, 63 (02) :135-140

[3]

KLIMGENBERG HH, 1983, APPL PHYS LETT, V43, P361

[4]

SHIMIZU T, 1995, IEICE T ELECTRON, VE78C, P1002

[5] FABRICATION OF THE EDGE TYPE THIN-FILM WARM CARRIER DEVICES [J].

SHIMIZU, T ;

YASUOKA, Y ;

GAMO, K .

MICROELECTRONIC ENGINEERING, 1995, 27 (1-4) :121-124

[6] THIN-FILM LONG-WIRE ANTENNA FOR 10.6-MU-M CO2-LASER RADIATION [J].

SHIMIZU, T ;

YASUOKA, Y ;

GAMO, K ;

NAMBA, S .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1992, 31 (10) :3359-3361

[7] N-INSB POINT CONTACT WARM CARRIER INFRARED-LASER DETECTORS [J].

YASUOKA, Y ;

OKUDA, T ;

INOUE, N .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1988, 27 (05) :L886-L888

← 1 →