Nanoporous gold films created using templates formed from self-assembled structures of inorganic-block copolymer micelles

被引：78

作者：

Haupt, M

Miller, S

Glass, R

Arnold, M

Sauer, R

Thonke, K

Möller, M

Spatz, JP ^{[1
]}

机构：

[1] Univ Heidelberg, Inst Phys Chem, D-69120 Heidelberg, Germany

[2] Univ Ulm, Abt Halbleiterphys, D-89069 Ulm, Germany

[3] Rhein Westfal TH Aachen, D-52062 Aachen, Germany

来源：

ADVANCED MATERIALS | 2003年 / 15卷 / 10期

关键词：

D O I：

10.1002/adma.200304688

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

A multistep procedure for creating nanohole-patterned gold films (see Figure) is presented. The steps include the self-assembly of metal-loaded polystyrene-block-poly(2-vinylpyridine) micelles on GaAs substrates, hydrogen gas plasma treatment, directional reactive ion etching, and gold sputtering. The size and separation of holes resemble that of the gold cluster pattern.

引用

页码：829 / +

页数：4

共 30 条

[1]

Alivisatos AP, 1998, ADV MATER, V10, P1297

[2]

Beginn U, 1998, ADV MATER, V10, P1391, DOI 10.1002/(SICI)1521-4095(199811)10:16<1391::AID-ADMA1391>3.3.CO

[3]

2-S

[4]

BEGINN U, 1999, SUPRAMOLECULAR TECHN, pCH3

[5] Integration of self-assembled diblock copolymers for semiconductor capacitor fabrication [J].

Black, CT ;

Guarini, KW ;

Milkove, KR ;

Baker, SM ;

Russell, TP ;

Tuominen, MT .

APPLIED PHYSICS LETTERS, 2001, 79 (03) :409-411

[6] Semiconductor nanostructures defined with self-organizing polymers [J].

Haupt, M ;

Miller, S ;

Ladenburger, A ;

Sauer, R ;

Thonke, K ;

Spatz, JP ;

Riethmüller, S ;

Möller, M ;

Banhart, F .

JOURNAL OF APPLIED PHYSICS, 2002, 91 (09) :6057-6059

[7]

Haupt M, 2001, PHYS STATUS SOLIDI B, V224, P867, DOI 10.1002/(SICI)1521-3951(200104)224:3<867::AID-PSSB867>3.0.CO

[8]

2-Q

[9] Impedance characteristics of the nanoporous honeycomb diamond electrodes for electrical double-layer capacitor applications [J].

Honda, K ;

Rao, TN ;

Tryk, DA ;

Fujishima, A ;

Watanabe, M ;

Yasui, K ;

Masuda, H .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2001, 148 (07) :A668-A679

[10]

Krausch G, 2002, ADV MATER, V14, P1579, DOI 10.1002/1521-4095(20021104)14:21<1579::AID-ADMA1579>3.0.CO

← 1 2 3 →