40-gb/s X-cut LiNbO3 optical modulator with two-step back-slot structure

被引:33
作者
Kondo, J [1 ]
Kondo, A
Aoki, K
Imaeda, M
Mori, T
Mizuno, Y
Takatsuji, S
Kozuka, Y
Mitomi, O
Minakata, M
机构
[1] NGK Insulators Ltd, Nagoya, Aichi 4678530, Japan
[2] Shizuoka Univ, Res Inst Elect, Hamamatsu, Shizuoka 4328011, Japan
关键词
integrated optoelectronics; laser ablation; optical fiber communication; optical modulation; optical waveguides; optoelectronic devices;
D O I
10.1109/JLT.2002.806766
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We propose a newly designed X-cut lithium niobate (LiNbO3) optical modulator. It has a two-step back-slot structure to satisfy the velocity-matching condition without the buffer layer of silicon dioxide NOD. Accordingly, this modulator can achieve low drive voltage and low optical insertion loss. In addition, the dc-drift phenomena due to the buffer layer can be suppressed. This structure is fabricated with micromachining technology using excimer laser ablation. The optical 3-dB bandwidth of the fabricated modulator reaches 30 GHz, and the drive voltage is less than 3 V at 1 kHz. From the measurement of the optical eye diagram at 43.5-Gb/s, clear eye openings were obtained. This modulator is sufficient for 40-Gb/s optical transmission systems.
引用
收藏
页码:2110 / 2114
页数:5
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