Emission characteristics of TiN-coated silicon field emitter arrays

被引：21

作者：

Kang, SY ^{[1
]}

Lee, JH ^{[1
]}

Song, YH ^{[1
]}

Kim, YT ^{[1
]}

Cho, KI ^{[1
]}

Yoo, HJ ^{[1
]}

机构：

[1] Elect & Telecommun Res Inst, Semicond Technol Div, Taejon 305600, South Korea

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1998年 / 16卷 / 02期

关键词：

D O I：

10.1116/1.590222

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We observed the emission characteristics and stability of TiN-coated Si field emitter arrays (FEAs) with a TIW gate structure. The TiN layer on Si tips was formed by a two-step rapid thermal nitridation process in an NH3 ambient by which a Ti layer was thermally converted to a TiN/TiSi2 bilayer. This process could suppress the formation of TiO2 on the surface and make the TiN layer thicker than a one-step process. By coating Si tips with TiN, the operating voltage of the TiN-coated Si FEAs was reduced by about 20 V compared with non-coated ones. Also, the TiN-coated Si FEAs showed thermally stable electron emission compared with non-coated ones. (C) 1998 American Vacuum Society. [S0734-211X(98)08002-0].

引用

页码：871 / 874

页数：4

共 8 条

[1]

ANCONA MG, 1995, P 8 INT VAC MICR C P, P61

[2]

JU BK, 1996, P INT VAC MICR C, P221

[3]

JUNG JH, 1996, P INT VAC MICR C, P231

[4] TiN barrier layer formation by the two-step rapid thermal conversion process [J].

Kim, YT ;

Jun, CH ;

Lee, JH ;

Baek, JT ;

Joun, H .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1996, 14 (06) :3245-3251

[5] Low operation voltage field emitter arrays using low work function materials fabricated by transfer mold technique. [J].

Nakamoto, M ;

Hasegawa, T ;

Ono, T ;

Sakai, T ;

Sakuma, N .

IEDM - INTERNATIONAL ELECTRON DEVICES MEETING, TECHNICAL DIGEST 1996, 1996, :297-300

[6]

Song YH, 1997, PROCEEDINGS OF THE FOURTH ASIAN SYMPOSIUM ON INFORMATION DISPLAY, P211

[7] FIELD-EMITTER ARRAYS FOR VACUUM MICROELECTRONICS [J].

SPINDT, CA ;

HOLLAND, CE ;

ROSENGREEN, A ;

BRODIE, I .

IEEE TRANSACTIONS ON ELECTRON DEVICES, 1991, 38 (10) :2355-2363

[8] PHYSICAL-PROPERTIES OF THIN-FILM FIELD-EMISSION CATHODES WITH MOLYBDENUM CONES [J].

SPINDT, CA ;

BRODIE, I ;

HUMPHREY, L ;

WESTERBERG, ER .

JOURNAL OF APPLIED PHYSICS, 1976, 47 (12) :5248-5263

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