CASINO V2.42 - A fast and easy-to-use modeling tool for scanning electron microscopy and microanalysis users

被引:1267
作者
Drouin, Dominique
Couture, Alexandre Real
Joly, Dany
Tastet, Xavier
Aimez, Vincent
Gauvin, Raynald
机构
[1] Univ Sherbrooke, Dept Elect Engn, Sherbrooke, PQ J1K 2R1, Canada
[2] McGill Univ, Dept Min Met & Mat Engn, Montreal, PQ H3A 2B2, Canada
关键词
Monte Carlo simulation software; scanning electron microscopy; BE line scan; X-ray line scan; E-beam lithography;
D O I
10.1002/sca.20000
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
Monte Carlo simulations have been widely used by microscopists for the last few decades. In the beginning it was a tedious and slow process, requiring a high level of computer skills from users and long computational times. Recent progress in the microelectronics industry now provides researchers with affordable desktop computers with clock rates greater than 3 GHz. With this type of computing power routinely available, Monte Carlo simulation is no longer an exclusive or long (overnight) process. The aim of this paper is to present a new user-friendly simulation program based on the earlier CASINO Monte Carlo program. The intent of this software is to assist scanning electron microscope users in interpretation of imaging and microanalysis and also with more advanced procedures including electron-beam lithography. This version uses a new architecture that provides results twice as quickly. This program is freely available to the scientific community and can be downloaded from the website: www.gel.usherb.ca/casino.
引用
收藏
页码:92 / 101
页数:10
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