共 29 条
[1]
Abdelmoneum MA, 2003, PROC IEEE MICR ELECT, P698
[4]
Bircumshaw B, 2003, BOSTON TRANSDUCERS'03: DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, P875
[5]
Demirci MU, 2003, P IEEE INT FREQ CONT, P810
[6]
Demirci MU, 2003, BOSTON TRANSDUCERS'03: DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, P955
[7]
FRERKING ME, 1978, CRYSTAL OSCILLATOR D
[8]
Stiffness-compensated temperature-insensitive micromechanical resonators
[J].
FIFTEENTH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST,
2002,
:731-734
[10]
Lee S, 2003, P IEEE INT FREQ CONT, P341