On the AlAs/GaAs (001) interface dielectric anisotropy

被引:19
作者
Hunderi, O
Zettler, JT
Haberland, K
机构
[1] NTNU, Dept Phys, N-7491 Trondheim, Norway
[2] LayTec GmbH, D-10587 Berlin, Germany
[3] Tech Univ Berlin, Inst Festkorperphys, D-10623 Berlin, Germany
关键词
reflectance anisotropy spectroscopy; Interface dielectric anisotropy; III-V semiconductor interfaces and surfaces;
D O I
10.1016/j.tsf.2004.06.150
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Reflectance anisotropy spectroscopy (RAS/RDS) so far has been mostly used for surface studies on Ill-V semiconductors. In the work reported here it was applied to the GaAs-AlAs (001) interface for measuring the interface dielectric anisotropy (IDA) by in-situ experiments performed in molecular beam epitaxy (MBE). From the measured RAS spectra of very thin AIAs overlayers (1-40 monolayers) on GaAs(001) the different contribution of surface, bulk and interface were separated. For the analysis, a three-layer model was used consisting of a single AlAs layer sandwiched between a well-separated and anisotropic interface layer and a surface layer. The upper limit for the 'thickness' of the surface and interface layers could be determined. Finally, an improved analytical formula for the deconvolution of surface and interface anisotropies is derived. (C) 2004 Elsevier B.V. All rights reserved.
引用
收藏
页码:261 / 269
页数:9
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