The role of dc current limitations in Fowler-Nordheim electron emission from carbon films

被引:36
作者
Cui, JB [1 ]
Teo, KBK [1 ]
Tsai, JTH [1 ]
Robertson, J [1 ]
Milne, WI [1 ]
机构
[1] Univ Cambridge, Dept Engn, Cambridge CB2 1PZ, England
关键词
D O I
10.1063/1.1310628
中图分类号
O59 [应用物理学];
学科分类号
摘要
We investigated the electron field emission characteristics of carbon films deposited by filtered cathodic vacuum arc. A special sandwich structure was created using alternating layers of carbon and aluminum. This structure allows both field emission and dc current-voltage characteristics to be measured on the same film. The emission current was found to follow the Fowler-Nordheim law below a critical field, E-cri. Above E-cri, the current deviates from the Fowler-Nordheim law but follows the dc current-voltage characteristics of the film. It is concluded that the frequently observed deviation of electron emission from the Fowler-Nordheim law at high field is due to the current limitation of the resistive carbon film. The important implication of this finding for device fabrication is discussed. (C) 2000 American Institute of Physics. [S0003-6951(00)00638-0].
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收藏
页码:1831 / 1833
页数:3
相关论文
共 9 条
[1]  
Amaratunga GAJ, 1996, APPL PHYS LETT, V68, P2529, DOI 10.1063/1.116173
[2]  
CUI JB, IN PRESS J APPL PHYS
[3]   Field electron emission from diamond-like carbon films deposited using RF inductively coupled CH4-plasma source [J].
Druz, BL ;
Polyakov, VI ;
Karabutov, AV ;
Rossukanyi, NM ;
Rukovishnicov, AI ;
Ostan, E ;
Hayes, A ;
Frolov, VD ;
Konov, VI .
DIAMOND AND RELATED MATERIALS, 1998, 7 (2-5) :695-698
[4]   Electron emission in intense electric fields [J].
Fowler, RH ;
Nordheim, L .
PROCEEDINGS OF THE ROYAL SOCIETY OF LONDON SERIES A-CONTAINING PAPERS OF A MATHEMATICAL AND PHYSICAL CHARACTER, 1928, 119 (781) :173-181
[5]   Field emission from tetrahedral amorphous carbon as a function of surface treatment and substrate material [J].
Hart, A ;
Satyanarayana, BS ;
Milne, WI ;
Robertson, J .
APPLIED PHYSICS LETTERS, 1999, 74 (11) :1594-1596
[6]   The influence of film-to-substrate characteristics on the electron field emission behavior of the diamond films [J].
Luo, JY ;
Liu, KS ;
Lee, JS ;
Lin, IN ;
Cheng, HF .
DIAMOND AND RELATED MATERIALS, 1998, 7 (2-5) :704-710
[7]   Theory of electron field emission from diamond and diamond-like carbon [J].
Robertson, J .
COVALENTLY BONDED DISORDERED THIN-FILM MATERIALS, 1998, 498 :197-208
[8]   The relationship between the spatially resolved field emission characteristics and the Raman spectra of a nanocrystalline diamond cold cathode [J].
Talin, AA ;
Pan, LS ;
McCarty, KF ;
Felter, TE ;
Doerr, HJ ;
Bunshah, RF .
APPLIED PHYSICS LETTERS, 1996, 69 (25) :3842-3844
[9]   Low-field electron emission from undoped nanostructured diamond [J].
Zhu, W ;
Kochanski, GP ;
Jin, S .
SCIENCE, 1998, 282 (5393) :1471-1473