A novel asymmetric silicon micro-mirror for optical beam scanning display

被引：44

作者：

Yamada, K ^{[1
]}

Kuriyama, T ^{[1
]}

机构：

[1] NEC Corp Ltd, ULSI Applicat Res Lab, Silicon Syst Res Labs, Sagamihara, Kanagawa 229, Japan

来源：

MICRO ELECTRO MECHANICAL SYSTEMS - IEEE ELEVENTH ANNUAL INTERNATIONAL WORKSHOP PROCEEDINGS | 1998年

关键词：

D O I：

10.1109/MEMSYS.1998.659738

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

A simple asymmetric micro-mirror excited by an external piezoelectric ceramic vibrating element, was shown to be effective for scanning an optical beam with an over-video-rate operating frequency at an over-30-degree beam-scanning angle. Using an SOI process simplifies the fabrication process and results in a very flat mirror surface. A structure consisting of two such mirrors (one horizontal and one vertical) was used to reproduce half-VGA computer images, The space effectiveness of this silicon micro-mirror optical-beam scanner was demonstrated in a super-small wearable micro-mirror display device. Full VGA and XGA displays should be possible by adding simple signal processing.

引用

页码：110 / 115

页数：2